RM 8111: Development of a Prototype Linewidth Standard
نویسندگان
چکیده
منابع مشابه
RM 8111: Development of a Prototype Linewidth Standard
Staffs of the Semiconductor Electronics Division, the Information Technology Laboratory, and the Precision Engineering Laboratory at NIST, have developed a new generation of prototype Single-Crystal CD (Critical Dimension) Reference (SCCDRM) Materials with the designation RM 8111. Their intended use is calibrating metrology instruments that are used in semiconductor manufacturing. Each referenc...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 2006
ISSN: 1044-677X
DOI: 10.6028/jres.111.016